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2022 International Electron Devices Meeting, IEDM 2022 ; 2022-December:735-738, 2022.
Article in English | Scopus | ID: covidwho-2257742

ABSTRACT

Conventional X-ray imaging architectures feature data redundancy and hardware consumption due to the separated sensory terminal and computing units. In-sensor computing architectures is promising to overcome such drawbacks. However, its realization in X-ray range remains elusive. We propose ion distribution induced reconfigurable mechanism, and demonstrate the first X-ray band in-sensor computing array based on Pb-free perovskite. Redistribution of Br- ion in perovskite induces the switching of PN and NP modes under electrical pooling. X-ray detection sensitivity can be switched between two stable self-power sensing modes with 4373±298 and -7804±429 mu mathrm{CGy}-{ mathrm{a} mathrm{i} mathrm{r}}{}{-1} mathrm{cm}{-2} respectively, which are superior than that of commercial a-Se detectors (20 mu mathrm{C} mathrm{G} mathrm{y}-{ mathrm{a} mathrm{i} mathrm{r}}{}{-1} mathrm{c} mathrm{m}{-2}). Both modes exhibit low detection limit of 48.4 mathrm{n} mathrm{G} mathrm{y}-{ mathrm{a} mathrm{i} mathrm{r}} mathrm{s}{-1}, which is two orders lower than typical medical dose rate of 5.5 mu mathrm{G} mathrm{y}-{ mathrm{a} mathrm{i} mathrm{r}} mathrm{s}{-1}. The perovskite array sensors can integrate with thin film transistors (TFTs) with low-temperature (80oC) process with good uniformity. An in-sensor computing algorithm of attention mechanism is performed on array sensors for chest X-ray images COVID-19 recognition, which enables an accuracy improvement up to 98.2%. Our results can pave the way for future intelligent X-ray imaging. © 2022 IEEE.

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